JEL Sorter System
A buffer function has been implemented in the Alaina, allowing for wafer replacement.
The sorter system complies with SEMI Standards (E15.1-0600, E57-0600, E62-0999, E63-0600, E64-0600). It features a buffer function in the aligner, enabling wafer exchange and achieving high throughput. With the built-in ID reader, it is possible to read the wafer ID (front and back support is optional). For more details, please contact us or refer to the catalog.
- Company:ジェーイーエル
- Price:Other